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56868 Metoder i mikro- og nanofabrikation

2024/2025

Previously, this course had the number 10868.
The course is intended as introductory course for PhD students who plan to perform cleanroom based Si micro- and nanofabrication in their PhD project and have no or limited previous experience in the DTU Nanolab cleanroom.
We recommend supervisors and students to contact a course responsible as early as possible to discuss the relevance of the course for the PhD student.
Kursusinformation
Methods in micro- and nanofabrication
Engelsk
5
Ph.d., Servicekursus (faglige færdigheder)
Kurset udbydes som enkeltfag
The duration of the course is 3 weeks. The course has continuous enrollment. To attend the course please contact Stephan Sylvest Keller, suke@dtu.dk or Jesper Yue Pan, jesyup@dtu.dk
Campus Lyngby
Hands-on instructions with take place in the Nanolab cleanroom. Lectures are held in the DTU Nanolab Seminar room (Building 347)
Hands-on instructions, lectures, e-learning, exercises, and project work.
[Kurset følger ikke DTUs normale skemastruktur]
Aftales med underviser, Last day of the course
Mundtlig eksamen og bedømmelse af øvelser
To pass the course you must: 1. Attend and pass all TPT's (Tool Package Trainings) and lectures 2. A) present the design and fabrication of a pressure sensor or B) prepare an application note and a presentation about a selected micro- or nanofabrication method.
Alle hjælpemidler - med adgang til internettet
bestået/ikke bestået , intern bedømmelse
Minimum 3 Maksimum: 6
Stephan Sylvest Keller , Lyngby Campus, Bygning 426 , suke@dtu.dk
Jesper Yue Pan , Tlf. (+45) 4525 5796 , jesyup@dtu.dk
56 DTU Nanolab
Hos underviser

Participants will be prioritized based on experience, timing in PhD study, need for cleanroom processing and registration date.
Overordnede kursusmål
The overall aim of the course is to provide you with theoretical background and hands-on experience in the most common experimental techniques used for Silicon microfabrication. You will be introduced to microfabrication methods such as photolithography, etching, thin film deposition and characterization techniques such as SEM and profilometry. This should enable you to design a fabrication process, draw a lithographic mask and safely work in the DTU Nanolab cleanroom.
Læringsmål
En studerende, der fuldt ud har opfyldt kursets mål, vil kunne:
  • se engelsk version
  • se engelsk version
  • se engelsk version
  • se engelsk version
  • se engelsk version
  • se engelsk version
  • se engelsk version
  • se engelsk version
  • se engelsk version
Kursusindhold
The course has a theoretical part, a methods part and an applied part. In the theoretical part, the physics, chemistry, and technology of the fabrication processes used in modern micro- and nanofabrication is described. Some of the subjects covered are: UV Lithography, Reactive Ion Etch (RIE), Lift off, Chemical Vapor Deposition (CVD), Plasma Enhanced CVD, Physical Vapor Deposition (PVD), Silicon and Silica as substrate materials, material modification by ion-implant and doping-diffusion, annealing, bonding: anodic bonding, fusion bonding, process integration, process simulation, and characterization. The methods part consists of 5 TPTs (Tool Package Trainings) containing hands-on instructions

1. Cleanroom safety
2. Lithography
3. Mask design
4. Scanning electron microscopy (SEM)
5. Plasma etching

In the applied part of the course, the students will A) follow a guided experimental part focusing on the fabrication of a pressure sensor in the DTU Nanolab cleanroom or B) acquire specialized knowledge in a selected topic of advanced micro- or nanofabrication. In both cases, the results will be presented to the other participants at the end of the course.
Litteraturhenvisninger
Course material will be available after course start.
Sidst opdateret
02. maj, 2024