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10851 Introduktion til renrums-baseret mikrofabrikation

2023/2024

The course is intended as the introductory hands-on cleanroom based Si micro- and nanofabrication course for MSc students

I tilfælde af overtegning skal civilingeniør, cand. polyt. (Fysik og Teknologi) studerende gives første prioritet
Kursusinformation
Introduction to cleanroom-based microfabrication
Engelsk
5
Kandidat
Kurset udbydes som enkeltfag
Januar
Campus Lyngby
Hands-on instructions will take place in the DTU Nanolab cleanroom. Lectures are held in building 358.
Hands-on instructions, lectures, e-learning, exercises, and project work.
3-uger
Sidste dag(e) i 3-ugersperioden
Mundtlig eksamen og bedømmelse af øvelser
To pass the course you must: 1. Attend and pass all TPT's (Tool Package Trainings) and lectures (exercises) 2. Design and fabricate an actual device in the cleanroom (exercise) 3. Prepare an oral presentation of the fabrication process and results (oral examination) 4. Contribute with a mini lecture about an advanced micro- and nanofabrication method
Alle hjælpemidler er tilladt
bestået/ikke bestået , intern bedømmelse
10852
Minimum 6 Maksimum: 12
Stephan Sylvest Keller , Lyngby Campus, Bygning 451 , suke@dtu.dk
Jesper Yue Pan , Tlf. (+45) 4525 5796 , jesyup@dtu.dk
10 Institut for Fysik
56 DTU Nanolab
I studieplanlæggeren
Overordnede kursusmål
The overall aim of the course is to provide you with theoretical background and hands-on experience in the most common experimental techniques used for Silicon microfabrication. You will be introduced to microfabrication methods such as photolithography, etching, thin film deposition and characterization techniques such as SEM and profilometry. During the course students will fabricate a working pressure sensor and characterize it in the DTU Nanolab cleanroom. This will enable you to design a fabrication process, draw a lithographic mask and work safely in the DTU Nanolab cleanroom.
Læringsmål
En studerende, der fuldt ud har opfyldt kursets mål, vil kunne:
  • se engelsk version
  • se engelsk version
  • se engelsk version
  • se engelsk version
  • se engelsk version
  • se engelsk version
  • se engelsk version
  • se engelsk version
  • se engelsk version
Kursusindhold
The course has a theoretical part and an experimental part. During the experimental part the students will fabricate and characterize a working piezoresistive pressure sensor. Experimental work will cover the following topics:

• Low Pressure Chemical Vapor Deposition
• UV lithography
• Chemical wet etch
• Reactive Ion Etch
• Physical Vapor Deposition
• Lift Off
• Scanning Electron Microscopy
• Probe station based electrical device characterization

In the theoretical part, the physics, chemistry, and technology of the fabrication processes
used in modern nano fabrication is described. Subjects covered are:

• All of the above and
• Plasma Enhanced CVD
• Substrate-materials: Silicon and Silica
• Material modification: Ion-implant and doping-diffusion, annealing
• Bonding: anodic bonding, fusion bonding
• Process integration
• Process simulation

For the exam the students will present the work they have done in the cleanroom and they will present the measured data from their pressure sensors.
Litteraturhenvisninger
Course material will be available after course start.
Sidst opdateret
04. maj, 2023