The course aims at introducing all around basic components (physical concept, equipment and software) from design to fabrication and characterization of silica/silicon optical planar waveguide components through hands-on experience En studerende, der fuldt ud har opfyldt kursets mål, vil kunne:

• Work confidently in the cleanroom
• Select proper material platform for different applications in integrated optics
• Design processing flows for device fabrication
• Interpret and optimize key processing steps in the fabrication of waveguide components
• Align fibers with nanoscale waveguides efficiently
• Handle chips and fibres with skills of dicing, cleaning and cleaving etc.
• Set up simple optical measurements
• Do component simulation and mask layout by using commercial softwares
• Describe working principles of waveguide components
• Apply knowledges to current waveguide components research and application

• Learn rules of working in the cleanroom
• Get familiar with key processings in the cleanroom, including film deposition, lithography and etching
• Build models of waveguides to simulate effective refractive index, coupling loss etc using commercial software
• Make mask layout using commercial software L-edit
• Do electron-beam lithography, including resist spin, e-beam exposure and developing
• Operate ''advanced silicon etcher '' (ASE) and edit recipes for silicon etching
• Investigate the nanoscale features using scanning electron microscope (SEM)
• Couple light in and out of waveguide components on 3-dimentional stages by tapered fibers
• Set up simple measurement circuits including light source, polarization controller and optical spectral analyzer (OSA) to measure propagation loss of straight waveguide by cutback method
• Setup OSA correctly with regard to resolution, sensitivity, average, sampling, and configure OSA and TLS to work in synchronization
• Measure silicon micro-ring resonators and analyze the difference between the design and the measured values 01. maj, 2018