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33651 Metoder i mikro og nano fabrikation

2018/2019

This is a course aimed at PhD students new to work in the DTU DANCHIP cleanroom. The
objective is to accelerate research projects by providing a fast track learning towards handson cleanroom fabrication.
To attend the course you MUST have a PhD project (or similar) that require you to work in
the DTU Danchip cleanroom.
Kursusinformation
Methods in micro and nano fabrication
Engelsk
5
Ph.d., Servicekursus (faglige færdigheder)
Kurset udbydes som enkeltfag
The duration of the course is 4 weeks. Course start is beginning of February, March, April,
May, June, September, October, and November. This course has continuous enrollment. To
attend the course please contact Anita Stick as@danchip.dtu.dk
Campus Lyngby
Hands-on instructions with take place in the Danchip cleanroom. Lectures are held at the DTU Danchip Seminar room (Building 347)
Hands-on instructions, lectures, e-learning, exercises, and project work.
[Kurset følger ikke DTUs normale skemastruktur]
Aftales med underviser
Bedømmelse af øvelser og rapport(er)
To pass the course you must: Attend and pass all selected TPT's (Tool Package Trainings) Design a process flow for your own process. The process flow must be approved Solve theoretical exercises
Alle hjælpemidler er tilladt
bestået/ikke bestået , intern bedømmelse
Thomas Pedersen , Lyngby Campus, Bygning 347, Tlf. (+45) 4525 5833 , thope@dtu.dk
Erik Vilain Thomsen , Lyngby Campus, Bygning 344, Tlf. (+45) 4525 5766 , ervt@dtu.dk
Stephan Sylvest Keller , Lyngby Campus, Bygning 345B, Tlf. (+45) 4525 5846 , suke@dtu.dk

33 Institut for Mikro- og Nanoteknologi
Hos underviser
Overordnede kursusmål
Devices and sub-systems fabricated using nano- and micro-fabrication techniques are used
in an increasing number of modern products ranging from airbag sensors for cars to the
processor in computers. The functionality of these products is critically dependent on the
micro- and nano-devices. Equally important, these methods are widely applied in
nanoscience and photonics research.
The overall aim of the course is to enable you to select relevant processes, to design a
fabrication process, and to safely work in the DTU DANCHIP cleanroom.
Læringsmål
En studerende, der fuldt ud har opfyldt kursets mål, vil kunne:
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  • se engelsk version
  • se engelsk version
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  • se engelsk version
  • se engelsk version
Kursusindhold
The course has a theoretical part and a methods part.
In the theoretical part, the physics, chemistry, and technology of the fabrication processes
used in modern nano fabrication is described:
·Lithography: UV-microlithography, e-beam nanolithography, and nano-imprint
·Pattern-transfer: etching, lift-off
·Thin film processes: CVD, PVD, spin-on
·Substrate-materials: Silicon and Silica
·Material modification: Ion-implant and doping-diffusion, annealing
·Bonding: anodic bonding, fusion bonding
·Process integration
·Process simulation
You will learn to use a modern process simulator (ATHENA - www.silvaco.com) which will
allow you to perform advanced computation.
The methods part consists of 3 mandatory and 2 selective TPTs (Tool Package Trainings)
containing hands-on instructions
1. Cleanroom safety*
2. Lithography*
3. Mask design*
4. Scanning electron microscopy
5. Plasma etching
*mandatory
In the final part of the course you work in teams to make process flows. Each student must
bring their own topic for a device or material to be fabricated.
Litteraturhenvisninger
Course material will be available after course start.
Sidst opdateret
01. oktober, 2018