The students will work in 3 groups on topics related to
waveguide components: designing using commercial software,
fabrication using the state-of-art cleanroom facilities at Danchip,
and characterization in the lab.
The course aims at introducing all around basic components
(physical concept, equipment and software) from design to
fabrication and characterization of silica/silicon optical planar
waveguide components through hands-on experience
Læringsmål:
En studerende, der fuldt ud har opfyldt kursets mål, vil kunne:
Work confidently in the cleanroom
Select proper material platform for different applications in
integrated optics
Design processing flows for device fabrication
Interpret and optimize key processing steps in the fabrication
of waveguide components
Align fibers with nanoscale waveguides efficiently
Handle chips and fibres with skills of dicing, cleaning and
cleaving etc.
Set up simple optical measurements
Do component simulation and mask layout by using commercial
softwares
Describe working principles of waveguide components
Apply knowledges to current waveguide components research and
application
Kursusindhold:
• Learn rules of working in the cleanroom
• Get familiar with key processings in the cleanroom, including
film deposition, lithography and etching
• Build models of waveguides to simulate effective refractive
index, coupling loss etc using commercial software
• Make mask layout using commercial software L-edit
• Do electron-beam lithography, including resist spin, e-beam
exposure and developing
• Operate ''advanced silicon etcher '' (ASE) and
edit recipes for silicon etching
• Investigate the nanoscale features using scanning electron
microscope (SEM)
• Couple light in and out of waveguide components on 3-dimentional
stages by tapered fibers
• Set up simple measurement circuits including light source,
polarization controller and optical spectral analyzer (OSA) to
measure propagation loss of straight waveguide by cutback method
• Setup OSA correctly with regard to resolution, sensitivity,
average, sampling, and configure OSA and TLS to work in
synchronization
• Measure silicon micro-ring resonators and analyze the difference
between the design and the measured values
